Ultra-high vacuum evaporation coating system, the vacuum evaporation system studio in Glove box water-free, oxygen-free, dust-free ultra-pure environment, PVD and Glove box hardware seamlessly docking, control integration, widely used in OLED, PLED, OPV research field.
ZZB Series Ultra High Vacuum Evaporation Coating System
Directly placing the vacuum chamber in the glove box environment, film preparation and later processes are seamlessly connected; this structure is simpler, more reliable and convenient than the traditional mechanical transfer between the vacuum chamber and the glove box environment.
The interior of the vacuum chamber adopts mirror polishing treatment to reduce surface outgassing and improve pumping speed.
The front door adopts side sliding structure to save space inside the glove box.
Front door locking mechanism adopts automatic locking, which is convenient, fast and reliable.
Molecular pump and mechanical pump, large pumping speed quasi-oil-free vacuum system (molecular pump pumping speed 1200L/S).
4 groups of metal evaporation source cum organic evaporation.
Professional vacuum evaporation power supply, constant current, constant voltage, constant power free choice of output.
Customizable mask mechanism for each pattern (mask)
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APPLICATION:
The user group of high vacuum resistance evaporation coating equipment is scientific research institutes and laboratories, which can vaporize organic, low melting point inorganic substances and metals. organic, low melting point inorganic substances and metals, etc., widely used in materials, physics, chemistry, electronics, energy and other related It is widely used in materials, physics, chemistry, electronics, energy and other related disciplines, as well as OLED/PLED/OPV research.
◆ Electromechanical integration of equipment, the whole machine fully enclosed design, both the use of safety, convenient maintenance, aesthetics and user operation The new upgraded product of the control experience.
◆ 304 vacuum special stainless steel, mirror polishing, vacuum chamber with front door, fast vacuum pumping speed, high vacuum high vacuum limit, easy to use and maintain.
The vacuum limit is up to 8×10-5Pa (3.75×10-7Torr) with 1200 type molecular pump as the main pump. 10-5Pa≤2h.
◆ Four groups of evaporation sources, compatible with the design of evaporation sources of metal materials and organic materials, with partitions between sources.