Product details
Due to the high measurement precision, and with a characteristic three-dimensional
noncontact measurement, and the use of computer control and rapid analysis,
calculate the measurement results, the instrument is suitable for all levels of test,
measurement research unit of measurement chamber mining industry, precision machine shop,
but also for institutions of higher learning and scientific research units.
The main technical parameters.
Uneven surface microstructure depth measurement range.
When on a continuous surface, there is no greater than the height mutant
1/4-wavelength between adjacent two pixels: 1000 -1nm
Adjacent hypermutation containing greater than 1/4 wavelength between two pixels:
130 -1nm
Measurement repeatability:δRa ≤0.5nm
Lens magnification: 40X
NA: Φ 65
Working distance: 0.5mm
Visual Field Instrument: Φ0.25mm
Image pick-up: 0.13 × 0.13mm
Visual Instrument magnification:
500 ×
Image pick-up (computer screen viewing) a
2500 ×
Measuring receiver array:
1000X1000
Pixel size: 5.2 × 5.2μm
Measuring time sampling (scan) Time: 1S
Instrument standard mirror reflectivity (high): ~ 50%
Reflectance (low): ~ 4%
Lighting: incandescent 6V 5W
Green interference filter wavelength: λ ≒ 530nm
Half-width λ ≒ 10nm
Main microscope lift: 110 mm
Table lift: 5 mm
X, Ah direction range: ~ 10 mm
Table rotation range of motion: 360 °
Workbench are oblique range: ± 6 °
Computer systems: P4, 2 .8G above, 1G memory than 17-inch flat screen monitor